Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin, Chyi Shyuan Chern +1 more | 2022-12-06 |
| 11318506 | Apparatus for cleaning semiconductor equipment | SHIH-KUO LIU, Keith Kuang-Kuo Koai, Wai Hong Cheah, Ming-Chuan Hung | 2022-05-03 |
| 10868241 | Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor device | Jim Wu, Li-Chun Tseng, Wen-Chih Wang, Keith Kuang-Kuo Koai | 2020-12-15 |