Issued Patents All Time
Showing 1–25 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427618 | Chemical-mechanical planarization pad and methods of use | Te-Chien Hou, Chih-Hung Chen, Shich-Chang Suen, Wen P. Liao, Kei-Wei Chen | 2025-09-30 |
| 12359090 | Composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Chih-Chieh Chang, Kao-Feng Liao, Peng-Chung Jangjian +4 more | 2025-07-15 |
| 12347735 | In-situ defect count detection in post chemical mechanical polishing | Chun-Hung Liao, Jeng-Chi Lin, Chi-Jen Liu, Huang-Lin Chao | 2025-07-01 |
| 12325102 | Chemical mechanical polishing apparatus and method | Shich-Chang Suen, Kei-Wei Chen | 2025-06-10 |
| 12297375 | Slurry composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Kei-Wei Chen, Chun-Wei Hsu, Li-Chieh Wu +6 more | 2025-05-13 |
| 12224179 | Metal heterojunction structure with capping metal layer | Yi-Sheng Lin, Chi-Jen Liu, Chi-Hsiang Shen, Te-Ming Kung, Chun-Wei Hsu +4 more | 2025-02-11 |
| 12172263 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2024-12-24 |
| 12170195 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Ting-Kui Chang, Chun-Chieh Lin | 2024-12-17 |
| 12131944 | Slurry composition, semiconductor structure and method for forming the same | Chun-Wei Hsu, Chih-Chieh Chang, Yi-Sheng Lin, Jian-Ci Lin, Jeng-Chi Lin +4 more | 2024-10-29 |
| 12068169 | Semiconductor processing tool and methods of operation | Ji Cui, Chih-Hung Chen, Kei-Wei Chen | 2024-08-20 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2024-06-04 |
| 11996283 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2024-05-28 |
| 11773353 | Semiconductor device cleaning solution, method of use, and method of manufacture | Pinlei Edmund Chu, Chun-Wei Hsu, Ling-Fu Nieh, Chi-Jen Liu, Yi-Sheng Lin | 2023-10-03 |
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin +4 more | 2023-10-03 |
| 11728215 | Fin Field-Effect Transistor device and method of forming the same | Shich-Chang Suen, Kei-Wei Chen | 2023-08-15 |
| 11728157 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Ting-Kui Chang, Chun-Chieh Lin | 2023-08-15 |
| 11679469 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2023-06-20 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2023-05-23 |
| 11637021 | Metal heterojunction structure with capping metal layer | Yi-Sheng Lin, Chi-Jen Liu, Chi-Hsiang Shen, Te-Ming Kung, Chun-Wei Hsu +4 more | 2023-04-25 |
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, CHIA-HSUN CHANG, Chih-Hung Chen, Tzu kai Lin, Chyi Shyuan Chern +1 more | 2022-12-06 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2022-11-22 |
| 11482450 | Methods of forming an abrasive slurry and methods for chemical- mechanical polishing | Chia Hsuan Lee, Chun-Wei Hsu, Chia-Wei Ho, Chi-Hsiang Shen, Li-Chieh Wu +6 more | 2022-10-25 |
| 11410846 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2022-08-09 |
| 11322345 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Ting-Kui Chang, Chun-Chieh Lin | 2022-05-03 |
| 11133247 | Vias with metal caps for underlying conductive lines | Chia-Wei Ho, Chun-Wei Hsu, Chi-Hsiang Shen, Chi-Jen Liu, Yi-Sheng Lin +3 more | 2021-09-28 |