Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362201 | Bevel edge removal methods, tools, and systems | Hui-Chi Huang, Pin-Chuan Su, Chien-Ming Wang, Kei-Wei Chen | 2025-07-15 |
| 12347735 | In-situ defect count detection in post chemical mechanical polishing | Chun-Hung Liao, Chi-Jen Liu, Liang-Guang Chen, Huang-Lin Chao | 2025-07-01 |
| 12131944 | Slurry composition, semiconductor structure and method for forming the same | Chun-Wei Hsu, Chih-Chieh Chang, Yi-Sheng Lin, Jian-Ci Lin, Ting-Hsun Chang +4 more | 2024-10-29 |
| 11664213 | Bevel edge removal methods, tools, and systems | Hui-Chi Huang, Pin-Chuan Su, Chien-Ming Wang, Kei-Wei Chen | 2023-05-30 |