Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359090 | Composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Chih-Chieh Chang, Kao-Feng Liao, Peng-Chung Jangjian +4 more | 2025-07-15 |
| 12362201 | Bevel edge removal methods, tools, and systems | Jeng-Chi Lin, Pin-Chuan Su, Chien-Ming Wang, Kei-Wei Chen | 2025-07-15 |
| D1079290 | Crevice brush | — | 2025-06-17 |
| 12327734 | Chemical mechanical polish slurry and method of manufacture | Chun-Hao Kung, Tung-Kai Chen, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2025-06-10 |
| 12297375 | Slurry composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Liang-Guang Chen, Kei-Wei Chen, Chun-Wei Hsu +6 more | 2025-05-13 |
| 12300508 | Chemical mechanical polishing method | Tung-Kai Chen, Ching-Hsiang Tsai, Kao-Feng Liao, Chih-Chieh Chang, Chun-Hao Kung +4 more | 2025-05-13 |
| 12249542 | Semiconductor device structure with an interconnect structure in a dielectric layer with multiple hydrophobic layers along sidewalls of the dielectric layer, and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2025-03-11 |
| D1049647 | Crevice brush | — | 2024-11-05 |
| 12128455 | Electrical cleaning tool for wafer polishing tool system | Chih-Wen Liu, Yeo-Sin Lin, Shu-Wei Hsu, Che-Hao Tu, Kei-Wei Chen | 2024-10-29 |
| 12087590 | Self-healing polishing pad | Chun-Hao Kung, Kei-Wei Chen, Yen-Ting Chen | 2024-09-10 |
| 12036636 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Kei-Wei Chen | 2024-07-16 |
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Kei-Wei Chen | 2024-07-09 |
| 11964358 | Chemical mechanical polishing apparatus and method | Shang-Yu Wang, Chun-Hao Kung, Ching-Hsiang Tsai, Kei-Wei Chen | 2024-04-23 |
| 11850704 | Methods to clean chemical mechanical polishing systems | Chih-Chieh Chang, Yen-Ting Chen, Kei-Wei Chen | 2023-12-26 |
| 11854827 | Magnetic slurry for highly efficiency CMP | Yen-Ting Chen, Chun-Hao Kung, Tung-Kai Chen, Kei-Wei Chen | 2023-12-26 |
| 11854872 | Semiconductor device structure with interconnect structure and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2023-12-26 |
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Zink Wei, Kei-Wei Chen | 2023-08-01 |
| 11664213 | Bevel edge removal methods, tools, and systems | Jeng-Chi Lin, Pin-Chuan Su, Chien-Ming Wang, Kei-Wei Chen | 2023-05-30 |
| 11590627 | Mega-sonic vibration assisted chemical mechanical planarization | Chun-Hao Kung, Shang-Yu Wang, Ching-Hsiang Tsai, Kei-Wei Chen | 2023-02-28 |
| 11551936 | Self-healing polishing pad | Chun-Hao Kung, Kei-Wei Chen, Yen-Ting Chen | 2023-01-10 |
| 11446785 | Methods to clean chemical mechanical polishing systems | Chih-Chieh Chang, Yen-Ting Chen, Kei-Wei Chen | 2022-09-20 |
| 11417566 | Semiconductor device structure with interconnect structure and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2022-08-16 |
| 11373879 | Chemical mechanical polishing method | Tung-Kai Chen, Ching-Hsiang Tsai, Kao-Feng Liao, Chih-Chieh Chang, Chun-Hao Kung +4 more | 2022-06-28 |
| 11264232 | Methods and systems for chemical mechanical polish cleaning | Chien-Ping Lee | 2022-03-01 |
| 11217479 | Multiple metallization scheme | Hsin-Ying Ho, Fang-I Chih, Kei-Wei Chen | 2022-01-04 |