Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Hui-Chi Huang, Kei-Wei Chen | 2024-07-09 |
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Wan-Chun Pan, Hui-Chi Huang, Kei-Wei Chen | 2023-08-01 |