Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030159 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Zink Wei, Hui-Chi Huang, Kei-Wei Chen | 2024-07-09 |
| 11712778 | Chemical mechanical planarization tool | Tung-Kai Chen, Shang-Yu Wang, Zink Wei, Hui-Chi Huang, Kei-Wei Chen | 2023-08-01 |
| 10522365 | Methods for reducing scratch defects in chemical mechanical planarization | William Weilun Hong, Ying-Tsung Chen | 2019-12-31 |
| 9592585 | System and method for CMP station cleanliness | Kuo-Yin Lin, Teng-Chun Tsai, Hsiang-Pi Chang, Chi-Yuan Chang | 2017-03-14 |
| 9508716 | Methods of manufacturing a semiconductor device | Cheng-Tung Lin, Teng-Chun Tsai, Li-Ting Wang, Chi-Yuan Chen, Kuo-Yin Lin +5 more | 2016-11-29 |
| 9153657 | Semiconductor devices comprising a fin | Chi-Yuan Chen, Teng-Chun Tsai, Kuo-Yin Lin, Hsiang-Pi Chang, Shi Ning Ju +3 more | 2015-10-06 |
| 9064959 | Method and apparatus for forming a CMOS device | Li-Ting Wang, Teng-Chun Tsai, Chun-Hsiung Lin, Cheng-Tung Lin, Chi-Yuan Chen +3 more | 2015-06-23 |
| 9048087 | Methods for wet clean of oxide layers over epitaxial layers | Li-Lan Wu, Chi-Yuan Chen, Ming Chyi Liu, Cary Chia-Chiung Lo, Teng-Chun Tsai +5 more | 2015-06-02 |
| 8889497 | Semiconductor devices and methods of manufacture thereof | Chi-Yuan Chen, Teng-Chun Tsai, Kuo-Yin Lin, Hsiang-Pi Chang, Shi Ning Ju +3 more | 2014-11-18 |
| 8853083 | Chemical mechanical polish in the growth of semiconductor regions | Kuo-Yin Lin, Hsiang-Pi Chang, Teng-Chun Tsai, Chi-Yuan Chen | 2014-10-07 |