Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10279311 | System and method for operating chemical mechanical polishing process | Chih-I Peng, Hsiang-Pi Chang, Teng-Chun Tsai, Kuo-Yin Lin, Chih-Yuan Yang | 2019-05-07 |
| 10190235 | Wafer supporting structure and method for forming the same | An-Li Ho, Chi-En Huang, Yi Jia Chen, Pu Chen | 2019-01-29 |
| 9937536 | Air purge cleaning for semiconductor polishing apparatus | Kuo-Yin Lin, Chih-I Peng, Kun-Tai Wu, Teng-Chun Tsai, Hsiang-Pi Chang | 2018-04-10 |
| 9048087 | Methods for wet clean of oxide layers over epitaxial layers | Li-Lan Wu, Chi-Yuan Chen, Ming Chyi Liu, Teng-Chun Tsai, Cheng-Tung Lin +5 more | 2015-06-02 |
| 8927362 | CMOS device and method of forming the same | Kuo-Cheng Ching, Shi Ning Ju, Huicheng Chang, Chun Chung Su | 2015-01-06 |
| 8680576 | CMOS device and method of forming the same | Kuo-Cheng Ching, Shi Ning Ju, Huicheng Chang, Chun Chung Su | 2014-03-25 |