Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131897 | Method and system for chemical mechanical polishing process | Hsiu-Ming Yeh, Yi-Chang Liu | 2024-10-29 |
| 11682552 | Apparatus for chemical mechanical polishing process | Hsiu-Ming Yeh, Yi-Chang Liu | 2023-06-20 |
| 10460926 | Method and apparatus for chemical mechanical polishing process | Hsiu-Ming Yeh, Yi-Chang Liu | 2019-10-29 |
| 10279311 | System and method for operating chemical mechanical polishing process | Hsiang-Pi Chang, Cary Chia-Chiung Lo, Teng-Chun Tsai, Kuo-Yin Lin, Chih-Yuan Yang | 2019-05-07 |
| 9937536 | Air purge cleaning for semiconductor polishing apparatus | Kuo-Yin Lin, Kun-Tai Wu, Teng-Chun Tsai, Hsiang-Pi Chang, Cary Chia-Chiung Lo | 2018-04-10 |
| 6857942 | Apparatus and method for pre-conditioning a conditioning disc | Yu-Liang Lin | 2005-02-22 |
| 6672950 | Contamination prevention system and method | Wen-Ten Chen, Yu-Chia Chang, Yao-Hsiang Liang | 2004-01-06 |
| 6394886 | Conformal disk holder for CMP pad conditioner | Wen-Ten Chen, Yao-Hsiang Liang, Yu-Chia Chang | 2002-05-28 |
| 6221199 | Apparatus and method for removing an adhesive bonded pad | Yu-Chia Chang, Chen-Chia Chiu, Yu-Sheng Shen | 2001-04-24 |