Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6672950 | Contamination prevention system and method | Chih-I Peng, Yu-Chia Chang, Yao-Hsiang Liang | 2004-01-06 |
| 6394886 | Conformal disk holder for CMP pad conditioner | Yao-Hsiang Liang, Chih-I Peng, Yu-Chia Chang | 2002-05-28 |
| 6272902 | Method and apparatus for off-line testing a polishing head | Chung-Yang Lin, Fang-Lin Lu, Kau-Po Yeh | 2001-08-14 |
| 5925849 | Floor mounted utility box | — | 1999-07-20 |