Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7052374 | Multipurpose slurry delivery arm for chemical mechanical polishing | Wen-Chen Chien, Chia-Cheng Chang, Yung-wang Lo | 2006-05-30 |
| 6272902 | Method and apparatus for off-line testing a polishing head | Wen-Ten Chen, Chung-Yang Lin, Kau-Po Yeh | 2001-08-14 |
| 6068544 | Apparatus and method for calibrating a polishing head | Chen-Chia Chiu, Kuo-Pao Yeh, Yu-Sheng Shen | 2000-05-30 |