Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7052374 | Multipurpose slurry delivery arm for chemical mechanical polishing | Fang-Lin Lu, Chia-Cheng Chang, Yung-wang Lo | 2006-05-30 |
| 6835649 | Tungsten plug with conductor capping layer | Wei-Cheng Lee, Yu-Da Fan, Kuo-Yen Liu, Yu-Ching Chang | 2004-12-28 |
| 6756309 | Feed forward process control method for adjusting metal line Rs | Chii-Ping Chen, Ching-Ming Tsai | 2004-06-29 |
| 6130149 | Approach for aluminum bump process | Chi-Hsin Lo, Ding-Jeng Yu | 2000-10-10 |