Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297375 | Slurry composition and method for polishing and integrated circuit | Ji Cui, Chi-Jen Liu, Liang-Guang Chen, Kei-Wei Chen, Chun-Wei Hsu +6 more | 2025-05-13 |
| 12068195 | Metal loss prevention using implantation | Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang, Su-Hao Liu +5 more | 2024-08-20 |
| 12002684 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2024-06-04 |
| 11996283 | Method for metal gate surface clean | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2024-05-28 |
| 11978664 | Polishing interconnect structures in semiconductor devices | Pang-Sheng Chang, Chao-Hsun Wang, Kuo-Yi Chao, Fu-Kai Yang, Mei-Yun Wang +1 more | 2024-05-07 |
| 11710659 | Metal loss prevention using implantation | Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang, Su-Hao Liu +5 more | 2023-07-25 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2023-05-23 |
| 11532514 | Structure and formation method of semiconductor device with conductive feature | Kuo-Hsiu Wei, Kei-Wei Chen, Tang-Kuei Chang, Chia Hsuan Lee, Jian-Ci Lin | 2022-12-20 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2022-11-22 |
| 11482450 | Methods of forming an abrasive slurry and methods for chemical- mechanical polishing | Chia Hsuan Lee, Chun-Wei Hsu, Chia-Wei Ho, Chi-Hsiang Shen, Jian-Ci Lin +6 more | 2022-10-25 |
| 11430691 | Polishing interconnect structures in semiconductor devices | Pang-Sheng Chang, Chao-Hsun Wang, Kuo-Yi Chao, Fu-Kai Yang, Mei-Yun Wang +1 more | 2022-08-30 |
| 11410846 | Method for metal gate surface clean | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2022-08-09 |
| 11211289 | Metal loss prevention using implantation | Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang, Su-Hao Liu +5 more | 2021-12-28 |
| 10957587 | Structure and formation method of semiconductor device with conductive feature | Kuo-Hsiu Wei, Kei-Wei Chen, Tang-Kuei Chang, Chia Hsuan Lee, Jian-Ci Lin | 2021-03-23 |
| 10937691 | Methods of forming an abrasive slurry and methods for chemical-mechanical polishing | Chia Hsuan Lee, Chun-Wei Hsu, Chia-Wei Ho, Chi-Hsiang Shen, Jian-Ci Lin +6 more | 2021-03-02 |
| 10916473 | Method of cleaning wafer after CMP | Chien-Hao Chung, Chang-Sheng Lin, Kuo-Feng Huang, Chun-Chieh Lin | 2021-02-09 |
| 10847359 | Method for metal gate surface clean | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2020-11-24 |
| 10755934 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Liang-Guang Chen, Ming-Liang Yen | 2020-08-25 |
| 10643892 | Metal loss prevention using implantation | Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang, Su-Hao Liu +5 more | 2020-05-05 |
| 10515808 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Liang-Guang Chen, Ming-Liang Yen | 2019-12-24 |
| 10510594 | Method of cleaning wafer after CMP | Chien-Hao Chung, Chang-Sheng Lin, Kuo-Feng Huang, Chun-Chieh Lin | 2019-12-17 |
| 10109523 | Method of cleaning wafer after CMP | Chien-Hao Chung, Chang-Sheng Lin, Kuo-Feng Huang, Chun-Chieh Lin | 2018-10-23 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Liang-Guang Chen, Shich-Chang Suen | 2018-03-13 |
| 9859165 | Planarization process for forming semiconductor device structure | Hui-Chi Huang | 2018-01-02 |
| 9633832 | Method for metal gate surface clean | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2017-04-25 |