Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755934 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen | 2020-08-25 |
| 10515808 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen | 2019-12-24 |
| 9508716 | Methods of manufacturing a semiconductor device | Cheng-Tung Lin, Teng-Chun Tsai, Li-Ting Wang, Chi-Yuan Chen, Kuo-Yin Lin +5 more | 2016-11-29 |
| 9449841 | Methods and systems for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen | 2016-09-20 |
| 9064959 | Method and apparatus for forming a CMOS device | Li-Ting Wang, Teng-Chun Tsai, Chun-Hsiung Lin, Cheng-Tung Lin, Chi-Yuan Chen +3 more | 2015-06-23 |
| 9048087 | Methods for wet clean of oxide layers over epitaxial layers | Li-Lan Wu, Chi-Yuan Chen, Ming Chyi Liu, Cary Chia-Chiung Lo, Teng-Chun Tsai +5 more | 2015-06-02 |