Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427618 | Chemical-mechanical planarization pad and methods of use | Te-Chien Hou, Chih-Hung Chen, Liang-Guang Chen, Wen P. Liao, Kei-Wei Chen | 2025-09-30 |
| 12325102 | Chemical mechanical polishing apparatus and method | Liang-Guang Chen, Kei-Wei Chen | 2025-06-10 |
| 11996283 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2024-05-28 |
| 11728215 | Fin Field-Effect Transistor device and method of forming the same | Kei-Wei Chen, Liang-Guang Chen | 2023-08-15 |
| 11718812 | Post-CMP cleaning composition for germanium-containing substrate | Ji Cui, William Weilun Hong, Gin-Chen Huang, Kei-Wei Chen | 2023-08-08 |
| 11410846 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2022-08-09 |
| 11117239 | Chemical mechanical polishing composition and method | Kei-Wei Chen, Liang-Guang Chen | 2021-09-14 |
| 11024540 | Fin field-effect transistor device and method of forming the same | Kei-Wei Chen, Liang-Guang Chen | 2021-06-01 |
| 10967478 | Chemical mechanical polishing apparatus and method | Liang-Guang Chen, Kei-Wei Chen | 2021-04-06 |
| 10847359 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2020-11-24 |
| 10755934 | Systems and methods for chemical mechanical polish and clean | Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen | 2020-08-25 |
| 10515808 | Systems and methods for chemical mechanical polish and clean | Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen | 2019-12-24 |
| 10504782 | Fin Field-Effect Transistor device and method of forming the same | Kei-Wei Chen, Liang-Guang Chen | 2019-12-10 |
| 10160088 | Advanced polishing system | Che-Liang Chung, Chun-Kai Tai, Wei-Chen Hsiao | 2018-12-25 |
| 10164053 | Semiconductor device and method | Che-Liang Chung, Chi-Te Huang, Kei-Wei Chen | 2018-12-25 |
| 9987720 | Method for operating a polishing head and method for polishing a substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2018-06-05 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2018-03-13 |
| 9802292 | Advanced polishing system | Che-Liang Chung, Chun-Kai Tai, Wei-Chen Hsiao | 2017-10-31 |
| 9633832 | Method for metal gate surface clean | Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2017-04-25 |
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai, Liang-Guang Chen | 2017-04-25 |
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Li-Chieh Wu, Liang-Guang Chen | 2017-01-24 |
| 9449841 | Methods and systems for chemical mechanical polish and clean | Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Liang-Guang Chen, Ming-Liang Yen | 2016-09-20 |
| 9352443 | Platen assembly, chemical-mechanical polisher, and method for polishing substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2016-05-31 |
| 9272386 | Polishing head, and chemical-mechanical polishing system for polishing substrate | Chin-Hsiang Chan, Liang-Guang Chen, Yung-Cheng Lu | 2016-03-01 |