Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Liang-Guang Chen, Shich-Chang Suen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Shich-Chang Suen, Liang-Guang Chen | 2017-01-24 |
| 9449841 | Methods and systems for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Liang-Guang Chen, Ming-Liang Yen | 2016-09-20 |
| 9269585 | Method for cleaning metal gate surface | Shich-Chang Suen, Chi-Jen Liu, He Hui Peng, Liang-Guang Chen, Yung-Chung Chen | 2016-02-23 |
| 9209272 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Shich-Chang Suen, Liang-Guang Chen | 2015-12-08 |
| 9076766 | Mechanism for forming metal gate structure | Chi-Jen Liu, Shich-Chang Suen, Liang-Guang Chen | 2015-07-07 |