Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9630295 | Mechanisms for removing debris from polishing pad | He Hui Peng, Fu-Ming Huang, Shich-Chang Suen, Han-Hsin Kuo, Chi-Ming Tsai | 2017-04-25 |
| 9633832 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2017-04-25 |
| 9564511 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2017-02-07 |
| 9553161 | Mechanism for forming metal gate structure | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2017-01-24 |
| 9482658 | Test system and method for determining thermal effects of tissue ablation on an ex vivo tissue | Junghun Choi | 2016-11-01 |
| 9460997 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2016-10-04 |
| 9449841 | Methods and systems for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2016-09-20 |
| 9352443 | Platen assembly, chemical-mechanical polisher, and method for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2016-05-31 |
| 9305880 | Interconnects for semiconductor devices | Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai | 2016-04-05 |
| 9272386 | Polishing head, and chemical-mechanical polishing system for polishing substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2016-03-01 |
| 9269585 | Method for cleaning metal gate surface | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2016-02-23 |
| 9252060 | Reduction of OCD measurement noise by way of metal via slots | Chi-Ming Tsai, Han-Hsin Kuo, Fu-Ming Huang, Hao-Jen Liao, Ming-Chung Liang | 2016-02-02 |
| 9209272 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2015-12-08 |
| 9209040 | Amorphorus silicon insertion for STI-CMP planarity improvement | Kuo-Min Lin, Wei-Lun Hong, Ying-Tsung Chen | 2015-12-08 |
| 9119464 | Brush cleaning system | Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai, He Hui Peng | 2015-09-01 |
| 9076766 | Mechanism for forming metal gate structure | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2015-07-07 |
| 8975179 | Planarization process for semiconductor device fabrication | Che-Hao Tu, Weilun Hong, Ying-Tsung Chen | 2015-03-10 |
| 8703612 | Process for forming contact plugs | Shich-Chang Suen, He Hui Peng, Wne-Pin Peng, Shwang-Ming Jeng | 2014-04-22 |
| 8598028 | Gate height loss improvement for a transistor | Che-Hao Tu, Chi-Jen Liu, Tzu-Chung Wang, Weilun Hong, Ying-Tsung Chen | 2013-12-03 |
| 8348719 | Polisher for chemical mechanical planarization | Hsin-Hsien Lu, Tien-I Bao, Shau-Lin Shue | 2013-01-08 |
| 8021566 | Method for pre-conditioning CMP polishing pad | Chia-Che Chuang, Wen-Chih Chiou, Hsin-Hsien Lu | 2011-09-20 |
| 7105446 | Apparatus for pre-conditioning CMP polishing pad | Chia-Che Chuang, Wen-Chih Chiou, Hsin-Hsien Lu | 2006-09-12 |