Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121028 | Semiconductor devices formed using multiple planarization processes | Chun-Wei Hsu, Ling-Fu Nieh, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin +2 more | 2021-09-14 |
| 11117239 | Chemical mechanical polishing composition and method | Shich-Chang Suen, Kei-Wei Chen | 2021-09-14 |
| 11114339 | Method for reducing metal plug corrosion and device | Ling-Fu Nieh, Chun-Wei Hsu, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin | 2021-09-07 |
| 11094555 | CMP slurry and CMP method | Chun-Wei Hsu, Chi-Jen Liu, Kei-Wei Chen, William Weilun Hong, Chi-Hsiang Shen +2 more | 2021-08-17 |
| 11037799 | Metal heterojunction structure with capping metal layer | Yi-Sheng Lin, Chi-Jen Liu, Kei-Wei Chen, Te-Ming Kung, William Weilun Hong +4 more | 2021-06-15 |
| 11024540 | Fin field-effect transistor device and method of forming the same | Shich-Chang Suen, Kei-Wei Chen | 2021-06-01 |
| 10967478 | Chemical mechanical polishing apparatus and method | Shich-Chang Suen, Kei-Wei Chen | 2021-04-06 |
| 10961487 | Semiconductor device cleaning solution, method of use, and method of manufacture | Pinlei Edmund Chu, Chun-Wei Hsu, Ling-Fu Nieh, Chi-Jen Liu, Yi-Sheng Lin | 2021-03-30 |
| 10937691 | Methods of forming an abrasive slurry and methods for chemical-mechanical polishing | Chia Hsuan Lee, Chun-Wei Hsu, Chia-Wei Ho, Chi-Hsiang Shen, Li-Chieh Wu +6 more | 2021-03-02 |
| 10847359 | Method for metal gate surface clean | Shich-Chang Suen, Li-Chieh Wu, Chi-Jen Liu, He Hui Peng, Yung-Chung Chen | 2020-11-24 |
| 10755934 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2020-08-25 |
| 10692732 | CMP slurry and CMP method | Chun-Wei Hsu, Chi-Jen Liu, Kei-Wei Chen, William Weilun Hong, Chi-Hsiang Shen +2 more | 2020-06-23 |
| 10636701 | Methods of forming semiconductor devices using multiple planarization processes | Chun-Wei Hsu, Ling-Fu Nieh, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin +2 more | 2020-04-28 |
| 10515808 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2019-12-24 |
| 10510601 | Method for reducing metal plug corrosion and device | Ling-Fu Nieh, Chun-Wei Hsu, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin | 2019-12-17 |
| 10504782 | Fin Field-Effect Transistor device and method of forming the same | Shich-Chang Suen, Kei-Wei Chen | 2019-12-10 |
| 10269555 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Ting-Kui Chang, Chun-Chieh Lin | 2019-04-23 |
| 10157781 | Method for forming semiconductor structure using polishing process | Chun-Wei Hsu, Chi-Jen Liu, Cheng-Chun Chang, Yi-Sheng Lin, Pinlei Edmund Chu | 2018-12-18 |
| 10062645 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2018-08-28 |
| 9987720 | Method for operating a polishing head and method for polishing a substrate | Shich-Chang Suen, Chin-Hsiang Chan, Yung-Cheng Lu | 2018-06-05 |
| 9962805 | Chemical mechanical polishing apparatus and method | Ting-Kui Chang, Fu-Ming Huang, Chun-Chieh Lin | 2018-05-08 |
| 9917173 | Oxidation and etching post metal gate CMP | Chi-Jen Liu, Li-Chieh Wu, Shich-Chang Suen | 2018-03-13 |
| 9768064 | Formation method of semiconductor device structure | Chun-Wei Hsu, Chi-Jen Liu, Cheng-Chun Chang, Yi-Sheng Lin | 2017-09-19 |
| 9723915 | Brush cleaning method | Fu-Ming Huang, Han-Hsin Kuo, Chi-Ming Tsai, He Hui Peng | 2017-08-08 |
| 9679848 | Interconnect structure for semiconductor devices | Han-Hsin Kuo, Chung-Chi Ko, Neng-Jye Yang, Fu-Ming Huang, Chi-Ming Tsai | 2017-06-13 |