Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365495 | Method for performing metallo-organic chemical vapor deposition of titanium nitride at reduced temperature | Shulin Wang, Huan Luo, Ming Xi, Mei Chang, Russell C. Ellwanger | 2002-04-02 |
| 6176930 | Apparatus and method for controlling a flow of process material to a deposition chamber | Tung-Ching Tseng, James Jin-Long Chen, Mark S. Johnson, John V. Schmitt, Sean Li | 2001-01-23 |
| 6159299 | Wafer pedestal with a purge ring | Lawrence Chung-Lai Lei, Russell C. Ellwanger | 2000-12-12 |
| 6106625 | Reactor useful for chemical vapor deposition of titanium nitride | Mark S. Johnson, Mei Chang, Lawrence Chung-Lai Lei | 2000-08-22 |
| 6063441 | Processing chamber and method for confining plasma | Lawrence Chung-Lai Lei, Mei Chang, Mark S. Johnson | 2000-05-16 |
| 6050506 | Pattern of apertures in a showerhead for chemical vapor deposition | Xin Sheng Guo, Ling Chen, Mohan K. Bhan, Bo Zheng | 2000-04-18 |