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Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
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Film to tie up loose fluorine in the chamber after a clean process |
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Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
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Method and apparatus for improving film stability of halogen-doped silicon oxide films |
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2000-07-18 |
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Pattern of apertures in a showerhead for chemical vapor deposition |
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Film to tie up loose fluorine in the chamber after a clean process |
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Method and apparatus for improving film stability of halogen-doped silicon oxide films |
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1999-12-14 |
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Method for improving film stability of fluorosilicate glass films |
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1998-10-27 |
