Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573181 | Method of forming contact structures using nitrogen trifluoride preclean etch process and a titanium chemical vapor deposition step | Ramanujapuram A. Srinivas, Jennifer Kopp | 2003-06-03 |
| 6410089 | Chemical vapor deposition of copper using profiled distribution of showerhead apertures | Xin Sheng Guo, Keith Kuang-Kuo Koai, Ling Chen, Bo Zheng | 2002-06-25 |
| 6319728 | Method for treating a deposited film for resistivity reduction | Ling Chen, Bo Zheng, Justin Jones, Seshadri Ganguli, Timothy E. Levine +2 more | 2001-11-20 |
| 6296712 | Chemical vapor deposition hardware and process | Xin Sheng Guo, Justin Jones, Lawrence Chung-Lai Lei, Russell C. Ellwanger, Mei Chang +2 more | 2001-10-02 |
| 6291028 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Amrita Verma, Sudhakar Subrahmanyam | 2001-09-18 |
| 6289843 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Amrita Verma, Sudhakar Subrahmanyam | 2001-09-18 |
| 6223685 | Film to tie up loose fluorine in the chamber after a clean process | Anand Gupta, Sudhakar Subrahmanyam | 2001-05-01 |
| 6121163 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Amrita Verma, Sudhakar Subrahmanyam | 2000-09-19 |
| 6090167 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Sudhakar Subrahmanyam, Anand Gupta, Viren V. S. Rana | 2000-07-18 |
| 6050506 | Pattern of apertures in a showerhead for chemical vapor deposition | Xin Sheng Guo, Keith Kuang-Kuo Koai, Ling Chen, Bo Zheng | 2000-04-18 |
| 6020035 | Film to tie up loose fluorine in the chamber after a clean process | Anand Gupta, Sudhakar Subrahmanyam | 2000-02-01 |
| 6001728 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Sudhakar Subrahmanyam, Anand Gupta, Viren V. S. Rana | 1999-12-14 |
| 5827785 | Method for improving film stability of fluorosilicate glass films | Sudhakar Subrahmanyam, Anand Gupta, Virendra V. Rana | 1998-10-27 |