Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6090167 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Mohan K. Bhan, Sudhakar Subrahmanyam, Anand Gupta | 2000-07-18 |
| 6001728 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Mohan K. Bhan, Sudhakar Subrahmanyam, Anand Gupta | 1999-12-14 |