| 6289843 |
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
Anand Gupta, Virendra V. Rana, Amrita Verma, Mohan K. Bhan |
2001-09-18 |
| 6291028 |
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
Anand Gupta, Virendra V. Rana, Amrita Verma, Mohan K. Bhan |
2001-09-18 |
| 6223685 |
Film to tie up loose fluorine in the chamber after a clean process |
Anand Gupta, Mohan K. Bhan |
2001-05-01 |
| 6121163 |
Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface |
Anand Gupta, Virendra V. Rana, Amrita Verma, Mohan K. Bhan |
2000-09-19 |
| 6090167 |
Method and apparatus for improving film stability of halogen-doped silicon oxide films |
Mohan K. Bhan, Anand Gupta, Viren V. S. Rana |
2000-07-18 |
| 6079426 |
Method and apparatus for determining the endpoint in a plasma cleaning process |
Tsutomu Tanaka, Mukul Kelkar |
2000-06-27 |
| 6020035 |
Film to tie up loose fluorine in the chamber after a clean process |
Anand Gupta, Mohan K. Bhan |
2000-02-01 |
| 6001728 |
Method and apparatus for improving film stability of halogen-doped silicon oxide films |
Mohan K. Bhan, Anand Gupta, Viren V. S. Rana |
1999-12-14 |
| 5827785 |
Method for improving film stability of fluorosilicate glass films |
Mohan K. Bhan, Anand Gupta, Virendra V. Rana |
1998-10-27 |
