Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Stuardo Robles, Anand Gupta, Virendra V. Rana | 2002-04-23 |
| 6289843 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Mohan K. Bhan, Sudhakar Subrahmanyam | 2001-09-18 |
| 6291028 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Mohan K. Bhan, Sudhakar Subrahmanyam | 2001-09-18 |
| 6121163 | Method and apparatus for improving the film quality of plasma enhanced CVD films at the interface | Anand Gupta, Virendra V. Rana, Mohan K. Bhan, Sudhakar Subrahmanyam | 2000-09-19 |
| 6103601 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Stuardo Robles, Anand Gupta, Virendra V. Rana | 2000-08-15 |
| 6079354 | Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers | Ted Guo, Barney M. Cohen | 2000-06-27 |
| 5763010 | Thermal post-deposition treatment of halogen-doped films to improve film stability and reduce halogen migration to interconnect layers | Ted Guo, Barney M. Cohen | 1998-06-09 |