Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745328 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Li-Qun Xia | 2010-06-29 |
| 7465659 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Li-Qun Xia | 2008-12-16 |
| 7459404 | Adhesion improvement for low k dielectrics | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Hichem M'Saad, Zhenjiang Cui +2 more | 2008-12-02 |
| 7157384 | Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Li-Qun Xia | 2007-01-02 |
| 7153787 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2006-12-26 |
| 7030041 | Adhesion improvement for low k dielectrics | Lihua Li, Tzu-Fang Huang, Li-Qun Xia, Hichem M'Saad, Zhenjiang Cui +2 more | 2006-04-18 |
| 7024105 | Substrate heater assembly | Mark Fodor, Sophia M. Velastegui, Soovo Sen, Visweswaren Sivaramakrishnan, Mario David Silvetti | 2006-04-04 |
| 7008484 | Method and apparatus for deposition of low dielectric constant materials | Kang Sub Yim, Soovo Sen, Dian Sugiarto, Ellie Yieh | 2006-03-07 |
| 6943127 | CVD plasma assisted lower dielectric constant SICOH film | Seon-Mee Cho, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2005-09-13 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Tzu-Fang Huang, Li-Qun Xia, Dian Sugiarto +2 more | 2005-06-28 |
| 6838393 | Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide | Kang Sub Yim, Melissa M. Tam, Dian Sugiarto, Chi-I Lang, Li-Qun Xia | 2005-01-04 |
| 6709715 | Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds | Chi-I Lang, Shin-Puu Jeng, Yeming Jim Ma, Fong Chang, David Cheung | 2004-03-23 |
| 6663713 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Stuardo Robles, Visweswaren Sivaramakrishnan, Bang Nguyen, Gayathri Rao, Gary Fong +2 more | 2003-12-16 |
| 6523494 | Apparatus for depositing low dielectric constant oxide film | Dung-Ching Perng, Thomas E. Deacon | 2003-02-25 |
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Stuardo Robles, Anand Gupta, Virendra V. Rana, Amrita Verma | 2002-04-23 |
| 6319324 | Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Shankar Vankataranan, Ruby Liao | 2001-11-20 |
| 6153540 | Method of forming phosphosilicate glass having a high wet-etch rate | Ishing Lou, Cary Ching, Rong Pan, Paul Edward Gee, Francimar Campana | 2000-11-28 |
| 6149987 | Method for depositing low dielectric constant oxide films | Dung-Ching Perng, Thomas E. Deacon | 2000-11-21 |
| 6149974 | Method for elimination of TEOS/ozone silicon oxide surface sensitivity | Bang Nguyen, Shankar Vankataranan, Ruby Liao | 2000-11-21 |
| 6121164 | Method for forming low compressive stress fluorinated ozone/TEOS oxide film | Ellie Yieh, Xin Zhang, Bang Nguyen, Stuardo Robles | 2000-09-19 |
| 6107184 | Nano-porous copolymer films having low dielectric constants | Robert P. Mandal, David Cheung, Chi-I Lang | 2000-08-22 |
| 6103601 | Method and apparatus for improving film stability of halogen-doped silicon oxide films | Stuardo Robles, Anand Gupta, Virendra V. Rana, Amrita Verma | 2000-08-15 |
| 6086952 | Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer | Chi-I Lang, Yeming Jim Ma, Fong Chang, Shin-Puu Jeng, David Cheung | 2000-07-11 |
| 5958510 | Method and apparatus for forming a thin polymer layer on an integrated circuit structure | Visweswaren Sivaramakrishnam, Bang Nguyen, Gayathri Rao, Stuardo Robles, Gary Fong +1 more | 1999-09-28 |