Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7825042 | Very low dielectric constant plasma-enhanced CVD films | — | 2010-11-02 |
| 7633163 | Very low dielectric constant plasma-enhanced CVD films | — | 2009-12-15 |
| 7601631 | Very low dielectric constant plasma-enhanced CVD films | — | 2009-10-13 |
| 7560377 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2009-07-14 |
| 7399697 | Very low dielectric constant plasma-enhanced CVD films | — | 2008-07-15 |
| 7265062 | Ionic additives for extreme low dielectric constant chemical formulations | Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2007-09-04 |
| 7205224 | Very low dielectric constant plasma-enhanced CVD films | — | 2007-04-17 |
| 7094710 | Very low dielectric constant plasma-enhanced CVD films | — | 2006-08-22 |
| 7030039 | Method of uniformly coating a substrate | Emir Gurer, Tom Zhong, John Lewellen, Edward C. Lee, James C. Grambow +5 more | 2006-04-18 |
| 7018943 | Method of uniformly coating a substrate | Gurer Emir, Tom Zhong, John Lewellen, Edward C. Lee, James C. Grambow +3 more | 2006-03-28 |
| 7012030 | Very low dielectric constant plasma-enhanced CVD films | — | 2006-03-14 |
| 6977098 | Method of uniformly coating a substrate | Emir Gurer, Tom Zhong, John Lewellen, Ed C. Lee, James C. Grambow +3 more | 2005-12-20 |
| 6930061 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-08-16 |
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6891134 | Integrally formed bake plate unit for use in wafer fabrication system | — | 2005-05-10 |
| 6890639 | Very low dielectric constant plasma-enhanced CVD films | — | 2005-05-10 |
| 6869896 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2005-03-22 |
| 6818289 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more | 2004-11-16 |
| 6770424 | Wafer track apparatus and methods for dispensing fluids with rotatable dispense arms | Dikran Babikian | 2004-08-03 |
| 6743737 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Farhad Moghadam | 2004-06-01 |
| 6734115 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2004-05-11 |
| 6660656 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-12-09 |
| 6596655 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2003-07-22 |
| 6596627 | Very low dielectric constant plasma-enhanced CVD films | — | 2003-07-22 |
| 6592980 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more | 2003-07-15 |