| 7825042 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2010-11-02 |
$16,115,000 |
| 7633163 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2009-12-15 |
$35,722,000 |
| 7601631 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2009-10-13 |
$11,309,000 |
| 7560377 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2009-07-14 |
$33,730,000 |
| 7399697 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2008-07-15 |
$16,085,000 |
| 7265062 |
Ionic additives for extreme low dielectric constant chemical formulations |
Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more |
2007-09-04 |
|
| 7205224 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2007-04-17 |
$10,588,000 |
| 7094710 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2006-08-22 |
$13,029,000 |
| 7030039 |
Method of uniformly coating a substrate |
Emir Gurer, Tom Zhong, John Lewellen, Edward C. Lee, James C. Grambow +5 more |
2006-04-18 |
$2,439,000 |
| 7018943 |
Method of uniformly coating a substrate |
Gurer Emir, Tom Zhong, John Lewellen, Edward C. Lee, James C. Grambow +3 more |
2006-03-28 |
$1,979,000 |
| 7012030 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2006-03-14 |
$17,746,000 |
| 6977098 |
Method of uniformly coating a substrate |
Emir Gurer, Tom Zhong, John Lewellen, Ed C. Lee, James C. Grambow +3 more |
2005-12-20 |
$2,344,000 |
| 6930061 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2005-08-16 |
$29,641,000 |
| 6896955 |
Ionic additives for extreme low dielectric constant chemical formulations |
Alexandros T. Demos, Timothy Weidman, Michael P. Nault, Nikolaos Bekiaris, Scott J. Weigel +3 more |
2005-05-24 |
|
| 6891134 |
Integrally formed bake plate unit for use in wafer fabrication system |
— |
2005-05-10 |
$4,461,000 |
| 6890639 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2005-05-10 |
$24,231,000 |
| 6869896 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2005-03-22 |
$21,686,000 |
| 6818289 |
Mesoporous films having reduced dielectric constants |
James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more |
2004-11-16 |
$17,530,000 |
| 6770424 |
Wafer track apparatus and methods for dispensing fluids with rotatable dispense arms |
Dikran Babikian |
2004-08-03 |
$5,709,000 |
| 6743737 |
Method of improving moisture resistance of low dielectric constant films |
Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Farhad Moghadam |
2004-06-01 |
$29,854,000 |
| 6734115 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2004-05-11 |
$50,143,000 |
| 6660656 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2003-12-09 |
$24,611,000 |
| 6596655 |
Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more |
2003-07-22 |
$37,702,000 |
| 6596627 |
Very low dielectric constant plasma-enhanced CVD films |
— |
2003-07-22 |
$37,702,000 |
| 6592980 |
Mesoporous films having reduced dielectric constants |
James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more |
2003-07-15 |
$26,668,000 |
