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Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Yung-Cheng Lu +5 more |
2009-07-14 |
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Plasma processes for depositing low dielectric constant films |
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2005-08-16 |
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Plasma processes for depositing low dielectric constant films |
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2005-03-22 |
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Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Yung-Cheng Lu +5 more |
2004-05-11 |
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Plasma processes for depositing low dielectric constant films |
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2003-12-09 |
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Method of depositing low dielectric constant carbon doped silicon oxide |
Wai-Fan Yau, Ju-Hyung Lee, Nasreen Chopra, Tzu-Fang Huang, David Cheung +5 more |
2003-10-14 |
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Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Yung-Cheng Lu +5 more |
2003-07-22 |
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Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Yung-Cheng Lu +5 more |
2003-05-13 |
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Plasma processes for depositing low dielectric constant films |
David Cheung, Wai-Fan Yau, Robert P. Mandal, Shin-Puu Jeng, Yung-Cheng Lu +5 more |
2003-04-01 |
| 6348725 |
Plasma processes for depositing low dielectric constant films |
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2002-02-19 |
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Plasma processes for depositing low dielectric constant films |
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2001-10-16 |
