Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7265062 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2007-09-04 |
| 6896955 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2005-05-24 |
| 6875687 | Capping layer for extreme low dielectric constant films | Timothy Weidman, Josephine Chang | 2005-04-05 |
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Nam Le, Martin Jay Seamons, Ameeta Madhava, Thomas Nowak +2 more | 2005-01-18 |
| 6818289 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more | 2004-11-16 |
| 6592980 | Mesoporous films having reduced dielectric constants | James Edward MacDougall, Kevin Ray Heier, Scott J. Weigel, Timothy Weidman, Alexandros T. Demos +3 more | 2003-07-15 |
| 6583071 | Ultrasonic spray coating of liquid precursor for low K dielectric coatings | Timothy Weidman, Yunfeng Lu, Michael Barnes, Farhad Moghadam | 2003-06-24 |
| 6576568 | Ionic additives for extreme low dielectric constant chemical formulations | Robert P. Mandal, Alexandros T. Demos, Timothy Weidman, Nikolaos Bekiaris, Scott J. Weigel +3 more | 2003-06-10 |
| 6190233 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Kaushal K. Singh, Anthony Lam, Virendra V. Rana +1 more | 2001-02-20 |
| 5990000 | Method and apparatus for improving gap-fill capability using chemical and physical etchbacks | Soonil Hong, Choon Kun Ryu, Kaushal K. Singh, Anthony Lam, Virendra V. Rana +1 more | 1999-11-23 |