Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6843881 | Detecting chemiluminescent radiation in the cleaning of a substrate processing chamber | Bok Hoen Kim, Martin Jay Seamons, Ameeta Madhava, Michael P. Nault, Thomas Nowak +2 more | 2005-01-18 | $25,041,000 |
| 6436303 | Film removal employing a remote plasma source | Bok Heon Kim, Joseph D'Souza, Ashish Shrotriya | 2002-08-20 | $16,370,000 |
| 6413321 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Bok Hoen Kim, Mario D. Silvetti, Ameeta Madhava, Davood Khalili, Martin Jay Seamons +2 more | 2002-07-02 | $21,510,000 |
| 5916669 | Enhanced abrasion resistance radiation curable coating for substrates | Theodore L. Parker, David S. Soane, Anthony Lam | 1999-06-29 | |
| 5910375 | Tintable, scratch resistant coatings for plastic ophthalmic lenses | Theodore L. Parker, Anthony Lam | 1999-06-08 |