Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Gregory J. Wilson, Karthik Ramanathan, Kevin Griffin | 2025-09-02 |
| 12305284 | Apparatus and methods for fine planar non-uniformity improvement | Muhannad Mustafa, Mandyam Sriram, Sanjeev Baluja | 2025-05-20 |
| 11976363 | Purge ring for pedestal assembly | Muhannad Mustafa, Kevin Griffin | 2024-05-07 |
| 11713508 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Hari Ponnekanti | 2023-08-01 |
| 8599531 | Electrostatic end effector apparatus, systems and methods | Satish Sundar, Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Taylor, William P. Laceky +2 more | 2013-12-03 |
| 7332262 | Photolithography scheme using a silicon containing resist | Ian Latchford, Christopher Dennis Bencher, Yuxiang Wang | 2008-02-19 |
| 7105460 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang +1 more | 2006-09-12 |
| 6967072 | Photolithography scheme using a silicon containing resist | Ian Latchford, Christopher Dennis Bencher, Yuxiang Wang | 2005-11-22 |
| 6927178 | Nitrogen-free dielectric anti-reflective coating and hardmask | Bok Hoen Kim, Sudha Rathi, Sang-Hoon Ahn, Christopher Dennis Bencher, Yuxiang Wang +4 more | 2005-08-09 |
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Kuo-Shih Liu, Ramana Veerasingam, Zhi Xu, Ping Xu, Gang Chen | 2003-04-29 |
| 6413321 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Bok Hoen Kim, Ameeta Madhava, Davood Khalili, Martin Jay Seamons, Emanuele Cappello +2 more | 2002-07-02 |