Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Kuo-Shih Liu, Zhi Xu, Ping Xu, Mario D. Silvetti, Gang Chen | 2003-04-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553932 | Reduction of plasma edge effect on plasma enhanced CVD processes | Kuo-Shih Liu, Zhi Xu, Ping Xu, Mario D. Silvetti, Gang Chen | 2003-04-29 |