Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12286710 | Methods of low-temperature/BEOL-compatible highly scalable graphene synthesis | Kaustav Banerjee, Ravi Iyengar, Nalin Rupesinghe | 2025-04-29 |
| 12281388 | Low-temperature/beol-compatible highly scalable graphene synthesis tool | Kaustav Banerjee, Ravi Iyengar, Nalin Rupesinghe | 2025-04-22 |
| 11976369 | Low-temperature/BEOL-compatible highly scalable graphene synthesis tool | Kaustav Banerjee, Ravi Iyengar, Nalin Rupesinghe | 2024-05-07 |
| 9812344 | Wafer processing system with chuck assembly maintenance module | Jason Rye, Mario David Silvetti, Randy Harris, Bryan Puch, Vincent Steffan Francischetti | 2017-11-07 |
| 8688398 | Method and apparatus for robot calibrations with a calibrating device | Vijay K. Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi +2 more | 2014-04-01 |
| 8599531 | Electrostatic end effector apparatus, systems and methods | Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Taylor, William P. Laceky, Jeffrey A. Brodine +2 more | 2013-12-03 |
| 8260461 | Method and system for robot calibrations with a camera | Sekar Krishnasamy, Vijay K. Sakhare, Mordechai Leska, Donald Foldenauer, Rinat Shimshi | 2012-09-04 |
| 8224607 | Method and apparatus for robot calibrations with a calibrating device | Vijay K. Sakhare, Sekar Krishnasamy, Mordechai Leska, Donald Foldenauer, Rinat Shimshi +2 more | 2012-07-17 |
| 8197443 | Detection apparatus and method | Swaminathan Balakrishnan, Albert Hartman | 2012-06-12 |
| 8147447 | High precision infusion pump controller | Swaminathan Balakrishnan, Ivan Melnyk | 2012-04-03 |
| 8147448 | High precision infusion pumps | Swaminathan Balakrishnan, Ivan Melnyk | 2012-04-03 |
| 8137312 | Detection apparatus and method | Swaminathan Balakrishnan, Albert Hartman | 2012-03-20 |
| 7997851 | Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Robert B. Moore, Eric Ruhland, Mario David Silvetti | 2011-08-16 |
| 7813832 | Method for on the fly positioning and continuous monitoring of a substrate in a chamber | — | 2010-10-12 |
| 7695232 | Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Robert B. Moore, Eric Ruhland, Mario David Silvetti | 2010-04-13 |
| 7527694 | Substrate gripping apparatus | — | 2009-05-05 |
| 7226269 | Substrate edge grip apparatus | Sanjeev Baluja | 2007-06-05 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot | Pyongwon Yim, Vinay Shah, Mario David Silvetti, Douglas Kitajima, Venkatesh Babu +3 more | 2006-09-12 |
| 6856863 | Method and apparatus for automatic calibration of robots | — | 2005-02-15 |
| 6685422 | Pneumatically actuated flexure gripper for wafer handling robots | Ned G. Matthews | 2004-02-03 |
| 6514033 | Mechanical gripper for wafer handling robots | — | 2003-02-04 |
| 6327517 | Apparatus for on-the-fly center finding and notch aligning for wafer handling robots | — | 2001-12-04 |
| 6322312 | Mechanical gripper for wafer handling robots | — | 2001-11-27 |
| 6283701 | Pneumatically actuated flexure gripper for wafer handling robots | Ned G. Matthews | 2001-09-04 |
| 6224312 | Optimal trajectory robot motion | — | 2001-05-01 |