Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911193 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2014-12-16 |
| 8886354 | Methods, systems and apparatus for rapid exchange of work material | Sushant S. Koshti | 2014-11-11 |
| 8689812 | Methods and loadport for purging a substrate carrier | Eric A. Englhardt, Jeffrey C. Hudgens, Martin R. Elliott | 2014-04-08 |
| 8672121 | Methods and apparatus for transporting substrate carriers | Jeffrey C. Hudgens | 2014-03-18 |
| 8601975 | Methods and loadport apparatus for purging a substrate carrier | Eric A. Englhardt, Jeffrey C. Hudgens, Martin R. Elliott | 2013-12-10 |
| 8569650 | Laser material removal methods and apparatus | Zhenhua Zhang, Virendra V. Rana, Chris Eberspacher | 2013-10-29 |
| 8379082 | System, methods and apparatus for substrate carrier content verification using a material handling system | Sushant S. Koshti, Eric A. Englhardt | 2013-02-19 |
| 8356968 | Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer | Sushant S. Koshti | 2013-01-22 |
| 8318512 | Automated substrate handling and film quality inspection in solar cell processing | Suresh Kumaraswami, Damon K. Cox | 2012-11-27 |
| 8309374 | Advanced platform for processing crystalline silicon solar cells | Keith Brian Porthouse, Peter G. Borden, Tristan R. Holtam, Lisong Zhou, Ian Latchford +1 more | 2012-11-13 |
| 8258426 | Laser material removal methods and apparatus | Zhenhua Zhang, Virendra V. Rana, Chris Eberspacher | 2012-09-04 |
| 8231431 | Solar panel edge deletion module | Dhruv Gajaria, Zhiyong Li, Gopalakrishna B. Prabhu, Yacov Elgar, John Visitacion +8 more | 2012-07-31 |
| 8207005 | Forming solar cells using a patterned deposition process | Timothy Weidman, Rohit Mishra, Michael P. Stewart, Kapila Wijekoon, Yonghwa Chris Cha +1 more | 2012-06-26 |
| 8074597 | Methods and apparatus for purging a substrate carrier | Eric A. Englhardt, Jeffrey C. Hudgens, Martin R. Elliott | 2011-12-13 |
| 8066466 | Substrate processing sequence in a Cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2011-11-29 |
| 7984543 | Methods for moving a substrate carrier | Martin R. Elliott, Eric A. Englhardt, Jeffrey C. Hudgens | 2011-07-26 |
| 7951637 | Back contact solar cells using printed dielectric barrier | Timothy Weidman, Rohit Mishra, Michael P. Stewart, Kapila Wijekoon, Yonghwa Chris Cha +1 more | 2011-05-31 |
| 7894923 | Methods and apparatus for sensing substrates in carriers | Sushant S. Koshti, Eric A. Englhardt | 2011-02-22 |
| 7833351 | Batch processing platform for ALD and CVD | Aaron P. Webb, Adam Brailove, Joseph Yudovsky, Nir Merry, Andrew J. Constant +3 more | 2010-11-16 |
| 7798764 | Substrate processing sequence in a cartesian robot cluster tool | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-09-21 |
| 7778721 | Small lot size lithography bays | Eric A. Englhardt | 2010-08-17 |
| 7720558 | Methods and apparatus for mapping carrier contents | Martin R. Elliott | 2010-05-18 |
| 7711445 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Martin R. Elliott, Robert B. Lowrance, Jeffrey C. Hudgens | 2010-05-04 |
| 7651306 | Cartesian robot cluster tool architecture | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2010-01-26 |
| 7611319 | Methods and apparatus for identifying small lot size substrate carriers | Martin R. Elliott, Jeffrey C. Hudgens, Eric A. Englhardt | 2009-11-03 |