| D1076836 |
Mainframe with integrated lid |
Michael R. Rice, Michael Kuchar, Robert M. McAndrew, Travis Morey, Adam J. Wyatt +2 more |
2025-05-27 |
| 12159796 |
Systems and methods for integrating load locks into a factory interface footprint space |
Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf |
2024-12-03 |
| 12159802 |
Shortened load port for factory interface |
Srinivas Poshatrahalli Gopalakrishna, Paul B. Reuter, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Arunkumar Ramachandraiah +1 more |
2024-12-03 |
| 12142508 |
Factory interface robots usable with integrated load locks |
Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant, Michael R. Rice +6 more |
2024-11-12 |
| 12076854 |
Increased number of load ports on factory interface with robot that moves on track |
Paul B. Reuter, Maureen Frances Breiling |
2024-09-03 |
| 11996307 |
Semiconductor processing tool platform configuration with reduced footprint |
Nir Merry, Schubert S. Chu, Michael Kuchar, Nyi O. Myo, Songjae Lee |
2024-05-28 |
| 11772958 |
Mass flow control based on micro-electromechanical devices |
Nir Merry, Paul Z. Wirth, Ming Xu, Raechel Chu-Hui Tan |
2023-10-03 |
| 11581203 |
Systems for integrating load locks into a factory interface footprint space |
Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf |
2023-02-14 |
| 11520358 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more |
2022-12-06 |
| 11450539 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more |
2022-09-20 |
| 11282724 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more |
2022-03-22 |
| 11169547 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Michael R. Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez +4 more |
2021-11-09 |
| 11087998 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more |
2021-08-10 |
| 10971381 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, John Mazzocco, Dean C. Hruzek, Michael Kuchar +2 more |
2021-04-06 |
| 10847391 |
Semiconductor device manufacturing platform with single and twinned processing chambers |
Nir Merry, Michael R. Rice, Jeffrey C. Hudgens |
2020-11-24 |
| 10409295 |
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) |
Ming Xu, Michael R. Rice, Steven E. Babayan, Jennifer Y. Sun |
2019-09-10 |
| 10199256 |
Methods and systems for improved mask processing |
Edward Ng, Jeffrey C. Hudgens, Ayan Majumdar |
2019-02-05 |
| 10192765 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more |
2019-01-29 |
| 9177842 |
Degassing apparatus adapted to process substrates in multiple tiers with second actuator |
Eric A. Englhardt, Richard Giljum, Jeffrey C. Hudgens, Igor Kogan, Michael R. Rice |
2015-11-03 |
| 8886354 |
Methods, systems and apparatus for rapid exchange of work material |
Vinay Shah |
2014-11-11 |
| 8379082 |
System, methods and apparatus for substrate carrier content verification using a material handling system |
Vinay Shah, Eric A. Englhardt |
2013-02-19 |
| 8356968 |
Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer |
Vinay Shah |
2013-01-22 |
| 7894923 |
Methods and apparatus for sensing substrates in carriers |
Eric A. Englhardt, Vinay Shah |
2011-02-22 |
| 7577487 |
Methods and apparatus for a band to band transfer module |
Robert B. Lowrance, Eric A. Englhardt, Michael R. Rice, Vinay Shah, Jeffrey C. Hudgens |
2009-08-18 |
