Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159795 | Enclosure system having walls comprising sidewalls and radio-frequency identifier holder coupled to rear wall | Rachel Sara Stolzman, Douglas R. McAllister | 2024-12-03 |
| 12027397 | Enclosure system shelf including alignment features | Aaron Green, Nicholas Michael Bergantz | 2024-07-02 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, Douglas B. Baumgarten | 2023-05-02 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Dean C. Hruzek, Nir Merry, Douglas B. Baumgarten | 2023-03-21 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2022-09-20 |
| 11373891 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same | Paul B. Reuter, Robin C. Armstrong, Nir Merry | 2022-06-28 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2022-03-22 |
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, Douglas B. Baumgarten | 2021-11-30 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2019-01-29 |