Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297691 | Seal mechanism for load port doors | James Christopher Hansen, Paul B. Reuter | 2025-05-13 |
| 12159802 | Shortened load port for factory interface | Srinivas Poshatrahalli Gopalakrishna, Paul B. Reuter, Devendra Channappa Holeyannavar, Sushant S. Koshti, Arunkumar Ramachandraiah +1 more | 2024-12-03 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more | 2024-11-12 |
| 12074045 | Prevention of contamination of substrates during gas purging | Russell Kaplan, Amitabh Puri, Paul B. Reuter | 2024-08-27 |
| 11993978 | Seal mechanism for load port doors | James Christopher Hansen, Paul B. Reuter | 2024-05-28 |
| 11842913 | Seal mechanisms for load ports | Paul B. Reuter, James Christopher Hansen | 2023-12-12 |
| 11810805 | Prevention of contamination of substrates during gas purging | Russell Kaplan, Amitabh Puri, Paul B. Reuter | 2023-11-07 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk | 2023-05-02 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk | 2023-03-21 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-09-20 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2022-03-22 |
| 11276594 | Systems, apparatus, and methods for an improved load port backplane | Paul B. Reuter | 2022-03-15 |
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk | 2021-11-30 |
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Paul B. Reuter, Luke Bonecutter | 2021-11-09 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Dean C. Hruzek, Paul B. Reuter, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti +1 more | 2021-07-13 |
| 10541165 | Systems, apparatus, and methods for an improved load port backplane | Paul B. Reuter | 2020-01-21 |
| 10453726 | Electronic device manufacturing load port apparatus, systems, and methods | David Blahnik, Paul B. Reuter, Luke Bonecutter | 2019-10-22 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more | 2019-01-29 |