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Seal mechanism for load port doors |
James Christopher Hansen, Paul B. Reuter |
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Shortened load port for factory interface |
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| 12142508 |
Factory interface robots usable with integrated load locks |
Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more |
2024-11-12 |
| 12074045 |
Prevention of contamination of substrates during gas purging |
Russell Kaplan, Amitabh Puri, Paul B. Reuter |
2024-08-27 |
| 11993978 |
Seal mechanism for load port doors |
James Christopher Hansen, Paul B. Reuter |
2024-05-28 |
| 11842913 |
Seal mechanisms for load ports |
Paul B. Reuter, James Christopher Hansen |
2023-12-12 |
| 11810805 |
Prevention of contamination of substrates during gas purging |
Russell Kaplan, Amitabh Puri, Paul B. Reuter |
2023-11-07 |
| 11640915 |
Side storage pods, equipment front end modules, and methods for operating EFEMs |
Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk |
2023-05-02 |
| 11610794 |
Side storage pods, equipment front end modules, and methods for operating the same |
Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk |
2023-03-21 |
| 11450539 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
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2022-09-20 |
| 11282724 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
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2022-03-22 |
| 11276594 |
Systems, apparatus, and methods for an improved load port backplane |
Paul B. Reuter |
2022-03-15 |
| 11189511 |
Side storage pods, equipment front end modules, and methods for operating EFEMs |
Paul B. Reuter, Dean C. Hruzek, Nir Merry, John C. Menk |
2021-11-30 |
| 11171029 |
Electronic device manufacturing load port apparatus, systems, and methods |
David Blahnik, Paul B. Reuter, Luke Bonecutter |
2021-11-09 |
| 11061417 |
Selectable-rate bottom purge apparatus and methods |
Dean C. Hruzek, Paul B. Reuter, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti +1 more |
2021-07-13 |
| 10541165 |
Systems, apparatus, and methods for an improved load port backplane |
Paul B. Reuter |
2020-01-21 |
| 10453726 |
Electronic device manufacturing load port apparatus, systems, and methods |
David Blahnik, Paul B. Reuter, Luke Bonecutter |
2019-10-22 |
| 10192765 |
Substrate processing systems, apparatus, and methods with factory interface environmental controls |
Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee +3 more |
2019-01-29 |
