Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2024-11-12 |
| 11791185 | Side storage pods, electronic device processing systems, and methods for operating the same | Paul B. Reuter | 2023-10-17 |
| 11782404 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2023-10-10 |
| 11647577 | Ionized gas vent to reduce on wafer static charge and particles | Narayanan Ramachandran, Devendra Channappa Holeyannavar | 2023-05-09 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11621182 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2023-04-04 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |
| 11508593 | Side storage pods, electronic device processing systems, and methods for operating the same | Paul B. Reuter | 2022-11-22 |
| 11450539 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-09-20 |
| 11353381 | Portable disc to measure chemical gas contaminants within semiconductor equipment and clean room | Devendra Channappa Holeyannavar, Arunkumar Ramachandraiah, Jeffrey C. Hudgens, Shivaraj Manjunath Nara, Paul B. Reuter | 2022-06-07 |
| 11282724 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2022-03-22 |
| 11244844 | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods | Paul B. Reuter, Murali Narasimhan, Amulya L. Athayde, Patrick D. Pannese, Nir Merry | 2022-02-08 |
| 11189511 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2021-11-30 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11061417 | Selectable-rate bottom purge apparatus and methods | Paul B. Reuter, Devendra Channappa Holeyannavar, Srinivas Poshatrahalli Gopalakrishna, Lakshmikantha K. Shirahatti, Babu Chinnasamy +1 more | 2021-07-13 |
| 11003149 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2021-05-11 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, John Mazzocco, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |
| 10847390 | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2020-11-24 |
| 10758045 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Izya Kremerman +1 more | 2020-09-01 |
| 10388547 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Sandesh Doddamane Ramappa, Michael R. Rice, Jeffrey A. Brodine | 2019-08-20 |
| 10359743 | Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls | Michael R. Rice | 2019-07-23 |
| 10278501 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Eran Weiss, Travis Morey, Nir Merry, Paul B. Reuter, Izya Kremerman +1 more | 2019-05-07 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2019-01-29 |
| 10159169 | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods | Joseph Vincent, Michael Kuchar, Vijayabaskar Soundarrajan, Pandu Maddherla, Adam J. Wyatt +1 more | 2018-12-18 |
| 9147592 | Linked vacuum processing tools and methods of using the same | Eric A. Englhardt, Steve Szudarski, Andrew Scott Cornelius, Amitabh Puri, Michael R. Rice +5 more | 2015-09-29 |