| 11830710 |
Internally divisible process chamber using a shutter disk assembly |
Anantha K. Subramani, Yang Guo |
2023-11-28 |
$39,424,000 |
| 11802340 |
UHV in-situ cryo-cool chamber |
Bharath Swaminathan, Hanbing Wu, Ashish Goel, Anantha K. Subramani |
2023-10-31 |
$79,893,000 |
| 11545347 |
Internally divisible process chamber using a shutter disk assembly |
Anantha K. Subramani, Yang Guo |
2023-01-03 |
$39,123,000 |
| 11361950 |
Multi-cathode processing chamber with dual rotatable shields |
Cory Eugene Lafollett |
2022-06-14 |
$21,647,000 |
| 11211230 |
Gas flow system |
Keith A. Miller, Wei Wang, Alexander ERENSTEIN |
2021-12-28 |
$93,125,000 |
| 11170982 |
Methods and apparatus for producing low angle depositions |
Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more |
2021-11-09 |
$68,627,000 |
| 11087998 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more |
2021-08-10 |
$94,755,000 |
| 11018036 |
Carrier adapter insert apparatus and carrier adapter insert detection methods |
Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar, Jeffrey C. Hudgens |
2021-05-25 |
$67,143,000 |
| 10998172 |
Substrate processing chamber having improved process volume sealing |
Ilya Lavitsky, Keith A. Miller |
2021-05-04 |
$101,757,000 |
| 10978276 |
Substrate processing apparatus including top reflector above annular lamp assembly |
Bharath Swaminathan, Hanbing Wu |
2021-04-13 |
$179,762,000 |
| 10971381 |
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods |
Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more |
2021-04-06 |
$63,491,000 |
| 10648071 |
Process kit having a floating shadow ring |
William Johanson, Siew Kit Hoi, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu |
2020-05-12 |
$50,210,000 |
| 10573498 |
Substrate processing apparatus including annular lamp assembly |
Bharath Swaminathan, Hanbing Wu |
2020-02-25 |
$22,337,000 |
| 10196845 |
Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal |
Nir Merry |
2019-02-05 |
$20,569,000 |
| 10115616 |
Carrier adapter insert apparatus and carrier adapter insert detection methods |
Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar, Jeffrey C. Hudgens |
2018-10-30 |
$15,195,000 |
| 10023954 |
Slit valve apparatus, systems, and methods |
Dale R. Du Bois, Juan Carlos Rocha-Alvarez |
2018-07-17 |
$37,247,000 |
| 9446522 |
Presence sensing and position correction for wafer on a carrier ring |
Daniel Greenberg |
2016-09-20 |
$12,933,000 |
| 9026244 |
Presence sensing and position correction for wafer on a carrier ring |
Daniel Greenberg |
2015-05-05 |
$12,368,000 |
| 7737035 |
Dual seal deposition process chamber and process |
Gary Lind, Colin F. Smith, William Johanson, Thomas M. Pratt |
2010-06-15 |
$8,494,000 |
