Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830710 | Internally divisible process chamber using a shutter disk assembly | Anantha K. Subramani, Yang Guo | 2023-11-28 |
| 11802340 | UHV in-situ cryo-cool chamber | Bharath Swaminathan, Hanbing Wu, Ashish Goel, Anantha K. Subramani | 2023-10-31 |
| 11545347 | Internally divisible process chamber using a shutter disk assembly | Anantha K. Subramani, Yang Guo | 2023-01-03 |
| 11361950 | Multi-cathode processing chamber with dual rotatable shields | Cory Eugene Lafollett | 2022-06-14 |
| 11211230 | Gas flow system | Keith A. Miller, Wei Wang, Alexander ERENSTEIN | 2021-12-28 |
| 11170982 | Methods and apparatus for producing low angle depositions | Anantha K. Subramani, Praburam Gopal Raja, Steven V. Sansoni, John C. Forster, Philip Allan Kraus +5 more | 2021-11-09 |
| 11087998 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-08-10 |
| 11018036 | Carrier adapter insert apparatus and carrier adapter insert detection methods | Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar, Jeffrey C. Hudgens | 2021-05-25 |
| 10998172 | Substrate processing chamber having improved process volume sealing | Ilya Lavitsky, Keith A. Miller | 2021-05-04 |
| 10978276 | Substrate processing apparatus including top reflector above annular lamp assembly | Bharath Swaminathan, Hanbing Wu | 2021-04-13 |
| 10971381 | Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods | Michael R. Rice, Michael Meyers, Dean C. Hruzek, Michael Kuchar, Sushant S. Koshti +2 more | 2021-04-06 |
| 10648071 | Process kit having a floating shadow ring | William Johanson, Siew Kit Hoi, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-05-12 |
| 10573498 | Substrate processing apparatus including annular lamp assembly | Bharath Swaminathan, Hanbing Wu | 2020-02-25 |
| 10196845 | Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal | Nir Merry | 2019-02-05 |
| 10115616 | Carrier adapter insert apparatus and carrier adapter insert detection methods | Edward Ng, Douglas MacLeod, David Phillips, Ayan Majumdar, Jeffrey C. Hudgens | 2018-10-30 |
| 10023954 | Slit valve apparatus, systems, and methods | Dale R. Du Bois, Juan Carlos Rocha-Alvarez | 2018-07-17 |
| 9446522 | Presence sensing and position correction for wafer on a carrier ring | Daniel Greenberg | 2016-09-20 |
| 9026244 | Presence sensing and position correction for wafer on a carrier ring | Daniel Greenberg | 2015-05-05 |
| 7737035 | Dual seal deposition process chamber and process | Gary Lind, Colin F. Smith, William Johanson, Thomas M. Pratt | 2010-06-15 |