Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods

Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods

US Patent 11087998 · Granted Aug 10, 2021

Estimated economic value: $94,755,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Atomic layer deposition coating system for inner walls of gas lines2025
Methods of operating a spatial deposition tool2025
Atomic layer deposition coatings for high temperature ceramic components2025
Mainframe of dual-robot substrate processing system2025
Mainframe of dual-robot substrate processing system2025
Plasma chamber with multiphase rotating independent gas cross-flow with reduced 2025
Parallel atomic layer deposition of target element interiors2025
Substrate transfer systems and methods of use thereof2025
Substrate support gap pumping to prevent glow discharge and light-up2025
Mainframe with integrated lid2025
Mainframe with integrated lid2025
Mainframe with integrated lid2025