Parallel atomic layer deposition of target element interiors

Assignee

• Applied Materials

Inventors

• Yogesh Tomar (2 patents)
• Nikshep Patil (4 patents)
• Kirubanandan Shanmugam Naina (1 patents)
• Hanish Kumar Panavalappil Kumarankutty (9 patents)
• Gayatri Natu (7 patents)
• Mahesh Arcot (5 patents)
• Senthil Kumar Nattamai Subramanian (3 patents)
• Hari Venkatesh Rajendran (2 patents)
• Michael R. Rice (217 patents)
• Christopher Laurent Beaudry (23 patents)

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