Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424481 | Modular substrate support assembly | Arvinder Manmohan Singh Chadha, Vijay D. Parkhe, Glen T. Mori | 2025-09-23 |
| D1092213 | Packaging insert for a process chamber component | Joseph Behnke, Trevor Edward Wilantewicz, Timothy Douglas Toth, Scott Osterman | 2025-09-09 |
| 12404584 | Parallel atomic layer deposition of target element interiors | Yogesh Tomar, Nikshep Patil, Kirubanandan Shanmugam Naina, Hanish Kumar Panavalappil Kumarankutty, Gayatri Natu +4 more | 2025-09-02 |
| 12406832 | Semiconductor chamber components with advanced dual layer nickel-containing coatings | Laksheswar Kalita, Nitin K. Ingle, Nilesh Mistry, Jonathan Strahle, Lok Kee Loh | 2025-09-02 |
| 12362150 | Semiconductor chamber components with advanced coating techniques | Laksheswar Kalita, Joseph Behnke, Ryan Pakulski, Jonathan Strahle | 2025-07-15 |
| 12100613 | Minimal contact packaging for process chamber components | Joseph Behnke, Trevor Edward Wilantewicz, Timothy Douglas Toth, Scott Osterman | 2024-09-24 |
| 11920234 | Yttrium oxide based coating composition | Vahid Firouzdor, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2024-03-05 |
| 11661650 | Yttrium oxide based coating composition | Vahid Firouzdor, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2023-05-30 |
| D984895 | Packaging insert for a process chamber component | Joseph Behnke, Trevor Edward Wilantewicz, Timothy Douglas Toth, Scott Osterman | 2023-05-02 |
| 11267095 | High throughput polishing system for workpieces | Stephen M Fisher, II, Robindranath Banerjee, Brian J. Brown | 2022-03-08 |
| 10460751 | Stripe height lapping control structures for a multiple sensor array | Steven C. Rudy, Shaoping Li | 2019-10-29 |
| 10008222 | Stripe height lapping control structures for a multiple sensor array | Steven C. Rudy, Shaoping Li | 2018-06-26 |
| 9950404 | High throughput polishing system for workpieces | Stephen M Fisher, II, Robindranath Banerjee, Brian J. Brown | 2018-04-24 |
| 9721595 | Method for providing a storage device | Steven C. Rudy, Shaoping Li | 2017-08-01 |
| 9715889 | Read sensor having an insulating layer capable of use in two-dimensional magnetic recording | Shaoping Li, Gerardo A. Bertero, Ming Mao, Shihai He, Steven C. Rudy +8 more | 2017-07-25 |
| 9437251 | Apparatus and method having TDMR reader to reader shunts | Steven C. Rudy, Luc Ving Chung, Shaoping Li, Jimmy Shen, Guolun Hao +1 more | 2016-09-06 |
| 9087527 | Apparatus and method for middle shield connection in magnetic recording transducers | Shaoping Li, Steven C. Rudy, Gerardo A. Bertero, Yunfei Ding | 2015-07-21 |
| 7521915 | Wafer bevel particle detection | Harald Herchen | 2009-04-21 |
| 7460972 | Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates | Sharathchandra Somayaji, David H. Quach | 2008-12-02 |
| 7341065 | Single wafer cleaning method to reduce particle defects on a wafer surface | Steven Verhaverbeke | 2008-03-11 |
| 7163018 | Single wafer cleaning method to reduce particle defects on a wafer surface | Steven Verhaverbeke | 2007-01-16 |