Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424481 | Modular substrate support assembly | Arvinder Manmohan Singh Chadha, Vijay D. Parkhe, Christopher Laurent Beaudry | 2025-09-23 |
| 11587799 | Methods and apparatus for processing a substrate | Chien-Kang HSIUNG, Yuichi Wada | 2023-02-21 |
| 11348823 | Compliant robot blade for substrate support and transfer | Steven V. Sansoni, Jeffrey A. Brodine | 2022-05-31 |
| 11289387 | Methods and apparatus for backside via reveal processing | Prayudi Lianto, Sik Hin Chi, SHIH-CHAO HUNG, Pin Gian Gan, Ricardo Fujii Vinluan +10 more | 2022-03-29 |
| 10629430 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Ananthkrishna Jupudi, Aksel Kitowski +1 more | 2020-04-21 |
| 10431489 | Substrate support apparatus having reduced substrate particle generation | Pulkit Agarwal, Song-Moon Suh, Steven V. Sansoni | 2019-10-01 |
| 10312127 | Compliant robot blade for defect reduction | Steven V. Sansoni, Jeffrey A. Brodine | 2019-06-04 |
| 9960035 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Ananthkrishna Jupudi, Aksel Kitowski +1 more | 2018-05-01 |
| 9954051 | Structure and method of fabricating three-dimensional (3D) metal-insulator-metal (MIM) capacitor and resistor in semi-additive plating metal wiring | Guan Huei See, Chin Hock Toh, Arvind Sundarrajan | 2018-04-24 |
| 9548200 | Variable frequency microwave (VFM) processes and applications in semiconductor thin film fabrications | Loke Yuen Wong, Ke Chang, Yueh Sheng Ow, Ananthkrishna Jupudi, Aksel Kitowski +1 more | 2017-01-17 |
| 9425076 | Substrate transfer robot end effector | Pulkit Agarwal, Daniel Greenberg, Song-Moon Suh, Jeffrey A. Brodine, Steven V. Sansoni | 2016-08-23 |
| 9269562 | In situ chamber clean with inert hydrogen helium mixture during wafer process | Robert Dinsmore, John C. Forster, Song-Moon Suh, Cheng-Hsiung Tsai | 2016-02-23 |
| 9177782 | Methods and apparatus for cleaning a substrate | James M. Holden, Song-Moon Suh, Shalina Sudheeran | 2015-11-03 |
| 9171714 | Integrated processing of porous dielectric, polymer-coated substrates and epoxy within a multi-chamber vacuum system confirmation | Yueh Sheng Ow | 2015-10-27 |
| 9147558 | Finned shutter disk for a substrate process chamber | Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Robert Dinsmore | 2015-09-29 |
| 9051655 | Boron ionization for aluminum oxide etch enhancement | Kai Wu, Sang Ho Yu, Kie Jin Park, Joshua Collins | 2015-06-09 |
| 6933025 | Chamber having components with textured surfaces and method of manufacture | Shyh-Nung Lin, Mark Menzie, Joe Sommers, Daniel Owen Clawson, Lolita Sharp | 2005-08-23 |
| 6777045 | Chamber components having textured surfaces and method of manufacture | Shyh-Nung Lin, Mark Menzie, Joe Sommers, Daniel Owen Clawson, Lolita Sharp | 2004-08-17 |
| 6428663 | Preventing defect generation from targets through applying metal spray coatings on sidewalls | Roman Mostovoy | 2002-08-06 |
| 6416634 | Method and apparatus for reducing target arcing during sputter deposition | Roman Mostovoy | 2002-07-09 |
| 6379428 | Method for reducing particle concentration within a semiconductor device fabrication tool | Roman Mostovoy | 2002-04-30 |
| 6228186 | Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies | Vikram Pavate, Keith J. Hansen, Murali Narasimhan, Seshadri Ramaswami, Jaim Nulman | 2001-05-08 |
| 6171455 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Murali Narasimhan, Seshadri Ramaswami, Jaim Nulman | 2001-01-09 |
| 6126791 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Murali Narasimhan, Seshadri Ramaswami, Jaim Nulman | 2000-10-03 |
| 6116032 | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps | Daniel Owen Clawson | 2000-09-12 |