Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6001227 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Murali Narasimhan, Seshadri Ramaswami, Jaim Nulman | 1999-12-14 |