| 8398832 |
Coils for generating a plasma and for sputtering |
Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more |
2013-03-19 |
$6,887,000 |
| 7234908 |
Apparatus for storing and moving a cassette |
Nissim Sidi |
2007-06-26 |
$17,529,000 |
| 7042558 |
Eddy-optic sensor for object inspection |
Moshe Sarfaty, Ramaswamy Sreenivasan |
2006-05-09 |
$14,267,000 |
| 6955517 |
Apparatus for storing and moving a cassette |
Nissim Sidi |
2005-10-18 |
$29,253,000 |
| 6783639 |
Coils for generating a plasma and for sputtering |
Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more |
2004-08-31 |
$40,709,000 |
| 6654698 |
Systems and methods for calibrating integrated inspection tools |
— |
2003-11-25 |
$30,675,000 |
| 6608495 |
Eddy-optic sensor for object inspection |
Moshe Sarfaty, Ramaswamy Sreenivasan |
2003-08-19 |
$39,032,000 |
| 6583509 |
Semiconductor processing techniques |
— |
2003-06-24 |
$19,441,000 |
| 6572321 |
Loader conveyor for substrate processing system |
— |
2003-06-03 |
$24,892,000 |
| 6514390 |
Method to eliminate coil sputtering in an ICP source |
Zheng Xu, Fusen Chen |
2003-02-04 |
$18,252,000 |
| 6506009 |
Apparatus for storing and moving a cassette |
Nissim Sidi |
2003-01-14 |
$32,327,000 |
| 6456894 |
Semiconductor processing techniques |
— |
2002-09-24 |
$13,765,000 |
| 6455921 |
Fabricating plug and near-zero overlap interconnect line |
Seshadri Ramaswami |
2002-09-24 |
$13,765,000 |
| 6408220 |
Semiconductor processing techniques |
— |
2002-06-18 |
$32,418,000 |
| 6368469 |
Coils for generating a plasma and for sputtering |
Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more |
2002-04-09 |
$34,803,000 |
| 6361618 |
Methods and apparatus for forming and maintaining high vacuum environments |
— |
2002-03-26 |
$33,068,000 |
| 6303395 |
Semiconductor processing techniques |
— |
2001-10-16 |
$34,819,000 |
| 6231725 |
Apparatus for sputtering material onto a workpiece with the aid of a plasma |
Zheng Xu |
2001-05-15 |
$105,754,000 |
| 6228186 |
Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies |
Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami |
2001-05-08 |
$105,222,000 |
| 6217721 |
Filling narrow apertures and forming interconnects with a metal utilizing a crystallographically oriented liner layer |
Zheng Xu, John C. Forster, Tse-Yong Yao, Fusen Chen |
2001-04-17 |
$52,708,000 |
| 6171455 |
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target |
Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami |
2001-01-09 |
$65,370,000 |
| 6126791 |
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target |
Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami |
2000-10-03 |
$78,095,000 |
| 6046100 |
Method of fabricating a fabricating plug and near-zero overlap interconnect line |
Seshadri Ramaswami |
2000-04-04 |
$176,878,000 |
| 6001227 |
Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target |
Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami |
1999-12-14 |
$142,487,000 |
| 5904562 |
Method of metallizing a semiconductor wafer |
— |
1999-05-18 |
$64,674,000 |
