Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398832 | Coils for generating a plasma and for sputtering | Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2013-03-19 |
| 7234908 | Apparatus for storing and moving a cassette | Nissim Sidi | 2007-06-26 |
| 7042558 | Eddy-optic sensor for object inspection | Moshe Sarfaty, Ramaswamy Sreenivasan | 2006-05-09 |
| 6955517 | Apparatus for storing and moving a cassette | Nissim Sidi | 2005-10-18 |
| 6783639 | Coils for generating a plasma and for sputtering | Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2004-08-31 |
| 6654698 | Systems and methods for calibrating integrated inspection tools | — | 2003-11-25 |
| 6608495 | Eddy-optic sensor for object inspection | Moshe Sarfaty, Ramaswamy Sreenivasan | 2003-08-19 |
| 6583509 | Semiconductor processing techniques | — | 2003-06-24 |
| 6572321 | Loader conveyor for substrate processing system | — | 2003-06-03 |
| 6514390 | Method to eliminate coil sputtering in an ICP source | Zheng Xu, Fusen Chen | 2003-02-04 |
| 6506009 | Apparatus for storing and moving a cassette | Nissim Sidi | 2003-01-14 |
| 6455921 | Fabricating plug and near-zero overlap interconnect line | Seshadri Ramaswami | 2002-09-24 |
| 6456894 | Semiconductor processing techniques | — | 2002-09-24 |
| 6408220 | Semiconductor processing techniques | — | 2002-06-18 |
| 6368469 | Coils for generating a plasma and for sputtering | Sergio Edelstein, Mani Subramani, Zheng Xu, Howard Grunes, Avi Tepman +2 more | 2002-04-09 |
| 6361618 | Methods and apparatus for forming and maintaining high vacuum environments | — | 2002-03-26 |
| 6303395 | Semiconductor processing techniques | — | 2001-10-16 |
| 6231725 | Apparatus for sputtering material onto a workpiece with the aid of a plasma | Zheng Xu | 2001-05-15 |
| 6228186 | Method for manufacturing metal sputtering target for use in DC magnetron so that target has reduced number of conduction anomalies | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami | 2001-05-08 |
| 6217721 | Filling narrow apertures and forming interconnects with a metal utilizing a crystallographically oriented liner layer | Zheng Xu, John C. Forster, Tse-Yong Yao, Fusen Chen | 2001-04-17 |
| 6171455 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami | 2001-01-09 |
| 6126791 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami | 2000-10-03 |
| 6046100 | Method of fabricating a fabricating plug and near-zero overlap interconnect line | Seshadri Ramaswami | 2000-04-04 |
| 6001227 | Target for use in magnetron sputtering of aluminum for forming metallization films having low defect densities and methods for manufacturing and using such target | Vikram Pavate, Keith J. Hansen, Glen T. Mori, Murali Narasimhan, Seshadri Ramaswami | 1999-12-14 |
| 5904562 | Method of metallizing a semiconductor wafer | — | 1999-05-18 |