MS

Mani Subramani

Applied Materials: 6 patents #1,918 of 7,310Top 30%
Overall (All Time): #809,962 of 4,157,543Top 20%
6
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11721532 Modular microwave source with local lorentz force Philip Allan Kraus, Thai Cheng Chua 2023-08-08
11037764 Modular microwave source with local Lorentz force Philip Allan Kraus, Thai Cheng Chua 2021-06-15
8398832 Coils for generating a plasma and for sputtering Jaim Nulman, Sergio Edelstein, Zheng Xu, Howard Grunes, Avi Tepman +2 more 2013-03-19
6783639 Coils for generating a plasma and for sputtering Jaim Nulman, Sergio Edelstein, Zheng Xu, Howard Grunes, Avi Tepman +2 more 2004-08-31
6368469 Coils for generating a plasma and for sputtering Jaim Nulman, Sergio Edelstein, Zheng Xu, Howard Grunes, Avi Tepman +2 more 2002-04-09
6254737 Active shield for generating a plasma for sputtering Sergio Edelstein 2001-07-03