Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340978 | Symmetric and irregular shaped plasmas using modular microwave sources | Farzad Houshmand, Christian Amormino, Philip Allan Kraus | 2025-06-24 |
| 12315739 | Isotropic silicon nitride removal | Mikhail Korolik, Paul Edward Gee, Wei Ying Doreen Yong, Tuck Foong Koh, John Sudijono +1 more | 2025-05-27 |
| 12300497 | Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene | Christian Valencia, Chikuang Charles Wang, Bencherki Mebarki, Hanh Nguyen, Philip Allan Kraus | 2025-05-13 |
| 12198966 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Jaeyong Cho | 2025-01-14 |
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2025-01-07 |
| 12144090 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus | 2024-11-12 |
| 12002654 | Modular high-frequency source | Christian Amormino, Hanh Nguyen, Kallol Bera, Philip Allan Kraus | 2024-06-04 |
| 11955331 | Method of forming silicon nitride films using microwave plasma | Hanhong Chen, Kelvin Chan, Philip Allan Kraus | 2024-04-09 |
| 11881384 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Vladimir Knyazik +1 more | 2024-01-23 |
| 11721532 | Modular microwave source with local lorentz force | Philip Allan Kraus, Mani Subramani | 2023-08-08 |
| 11670489 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus | 2023-06-06 |
| 11564292 | Monolithic modular microwave source with integrated temperature control | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus | 2023-01-24 |
| 11501955 | Modular high-frequency source with integrated gas distribution | Hanh Nguyen, Philip Allan Kraus | 2022-11-15 |
| 11488796 | Thermal break for high-frequency antennae | Hanh Nguyen, Philip Allan Kraus | 2022-11-01 |
| 11404248 | Modular microwave plasma source | Philip Allan Kraus | 2022-08-02 |
| 11393661 | Remote modular high-frequency source | Hanh Nguyen, Philip Allan Kraus | 2022-07-19 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |
| 11114282 | Phased array modular high-frequency source | Philip Allan Kraus, Christian Amormino, Dmitry A. Dzilno | 2021-09-07 |
| 11081317 | Modular high-frequency source | Christian Amormino, Hanh Nguyen, Kallol Bera, Philip Allan Kraus | 2021-08-03 |
| 11049694 | Modular microwave source with embedded ground surface | Joseph AuBuchon, James D. Carducci, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus | 2021-06-29 |
| 11037764 | Modular microwave source with local Lorentz force | Philip Allan Kraus, Mani Subramani | 2021-06-15 |
| 10943768 | Modular high-frequency source with integrated gas distribution | Hanh Nguyen, Philip Allan Kraus | 2021-03-09 |
| 10937678 | Substrate support with multiple embedded electrodes | Philip Allan Kraus, Jaeyong Cho | 2021-03-02 |
| 10763150 | System for coupling a voltage to spatially segmented portions of the wafer with variable voltage | Roger Alan Lindley, Philip Allan Kraus | 2020-09-01 |
| 10748745 | Modular microwave plasma source | Philip Allan Kraus | 2020-08-18 |