| 12340980 |
Plasma showerhead with improved uniformity |
Chaowei Wang, Kenneth Brian Doering, Kartik Shah, Kevin Griffin, Hao Zhang |
2025-06-24 |
|
| 12305283 |
Dithering or dynamic offsets for improved uniformity |
Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan |
2025-05-20 |
|
| 12119221 |
PEALD nitride films |
Philip Allan Kraus, Joseph AuBuchon |
2024-10-15 |
$93,354,000 |
| 12077861 |
Dithering or dynamic offsets for improved uniformity |
Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan |
2024-09-03 |
$44,731,000 |
| 11955331 |
Method of forming silicon nitride films using microwave plasma |
Kelvin Chan, Philip Allan Kraus, Thai Cheng Chua |
2024-04-09 |
$47,694,000 |
| 11823870 |
PEALD titanium nitride with direct microwave plasma |
Arkaprava Dan, Joseph AuBuchon, Kyoung Ha Kim, Philip Allan Kraus |
2023-11-21 |
$39,416,000 |
| 11761083 |
Methods for controlling a flow pulse shape |
Joseph AuBuchon, Kevin Griffin |
2023-09-19 |
$44,467,000 |
| 11626281 |
PEALD nitride films |
Philip Allan Kraus, Joseph AuBuchon |
2023-04-11 |
$32,726,000 |
| 11586789 |
Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity |
Dhritiman Subha Kashyap, Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan +2 more |
2023-02-21 |
$24,540,000 |
| 11315769 |
Plasma source for rotating susceptor |
Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand |
2022-04-26 |
$43,127,000 |
| 11220747 |
Complementary pattern station designs |
Joseph AuBuchon, Sanjeev Baluja, Michael R. Rice, Arkaprava Dan |
2022-01-11 |
$177,279,000 |
| 10985009 |
Methods to deposit flowable (gap-fill) carbon containing films using various plasma sources |
Lakmal C. Kalutarage, Mark Saly, David Thompson, William J. Durand, Kelvin Chan +1 more |
2021-04-20 |
$98,122,000 |
| 10903056 |
Plasma source for rotating susceptor |
Kallol Bera, Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand |
2021-01-26 |
$35,448,000 |
| 9281357 |
DRAM MIM capacitor using non-noble electrodes |
David Chi, Imran Hashim, Mitsuhiro Horikawa, Sandra G. Malhotra |
2016-03-08 |
$504,000 |
| 9224878 |
High work function, manufacturable top electrode |
Sandra G. Malhotra, Wim Deweerd, Arthur Gevondyan, Hiroyuki Ode |
2015-12-29 |
$129,000 |
| 9178006 |
Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications |
Xiangxin Rui, Naonori Fujiwara, Imran Hashim, Kenichi Koyanagi |
2015-11-03 |
$43,000 |
| 9178010 |
Adsorption site blocking method for co-doping ALD films |
Sandra G. Malhotra, Wim Deweerd, Toshiyuki Hirota, Hiroyuki Ode |
2015-11-03 |
$43,000 |
| 9082782 |
Inexpensive electrode materials to facilitate rutile phase titanium oxide |
Toshiyuki Hirota, Pragati Kumar, Xiangxin Rui, Sunil Shanker |
2015-07-14 |
$204,000 |
| 8980744 |
Inexpensive electrode materials to facilitate rutile phase titanium oxide |
Toshiyuki Hirota, Pragati Kumar, Xiangxin Rui, Sunil Shanker |
2015-03-17 |
|
| 8975147 |
Enhanced work function layer supporting growth of rutile phase titanium oxide |
Xiangxin Rui, Pragati Kumar, Sandra G. Malhotra |
2015-03-10 |
|
| 8975633 |
Molybdenum oxide top electrode for DRAM capacitors |
Wim Deweerd, Hiroyuki Ode |
2015-03-10 |
|
| 8969169 |
DRAM MIM capacitor using non-noble electrodes |
David Chi, Imran Hashim, Mitsuhiro Horikawa, Sandra G. Malhotra |
2015-03-03 |
$309,000 |
| 8900418 |
Yttrium and titanium high-k dielectric films |
Imran Hashim, Tony P. Chiang, Indranil De, Nobi Fuchigami, Edward Haywood +3 more |
2014-12-02 |
|
| 8900422 |
Yttrium and titanium high-K dielectric film |
Imran Hashim, Indranil De, Tony P. Chiang, Edward Haywood, Nobi Fuchigami +3 more |
2014-12-02 |
|
| 8901708 |
Yttrium and titanium high-k dielectric films |
Imran Hashim, Tony P. Chiang, Indranil De, Nobumichi Fuchigami, Edward Haywood +3 more |
2014-12-02 |
$263,000 |
