Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11965246 | Deposition method and deposition apparatus | — | 2024-04-23 |
| 9178006 | Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications | Xiangxin Rui, Hanhong Chen, Imran Hashim, Kenichi Koyanagi | 2015-11-03 |
| 8574998 | Leakage reduction in DRAM MIM capacitors | Sandra G. Malhotra, Kenichi Koyanagi, Hiroyuki Ode, Xiangxin Rui, Takashi Arao | 2013-11-05 |
| 7491652 | In-line processing for forming a silicon nitride film | Hiroyuki Kitamura | 2009-02-17 |