Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1080812 | Gas mixer | Youngki Chang, Rakesh Ramadas, Ashutosh Agarwal, Shashidhara Patel H B, Muhannad Mustafa +1 more | 2025-06-24 |
| 12308218 | Thermal shield for processing chamber | Youngki Chang, Muhannad Mustafa, Kartik Shah, Dhivanraj Subramanian | 2025-05-20 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Eric J. Hoffmann, Kartik Shah, Amit Rajendra Sherekar, Sanjeev Baluja | 2024-08-06 |
| 11818810 | Heater assembly with purge gap control and temperature uniformity for batch processing chambers | Amit Rajendra Sherekar, Kartik Shah, Ashutosh Agarwal, Eric J. Hoffmann, Sanjeev Baluja +1 more | 2023-11-14 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar +1 more | 2023-09-26 |
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Sanjeev Baluja | 2023-06-20 |
| 11583816 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Michael R. Rice | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Kartik Shah | 2023-02-21 |
| 11586789 | Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity | Chaowei Wang, Kartik Shah, Kevin Griffin, Karthik Ramanathan, Hanhong Chen +2 more | 2023-02-21 |
| 11549183 | Showerhead with inlet mixer | Ashutosh Agarwal, Sanjeev Baluja, Kartik Shah, Yanjun Xia | 2023-01-10 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2022-10-25 |
| 11430686 | Pedestal heater for spatial multi-wafer processing tool | Tejas Ulavi, Sanjeev Baluja | 2022-08-30 |
| 11110425 | Gas distribution plate for thermal deposition | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Michael R. Rice | 2021-09-07 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Gopu Krishna, Sanjeev Baluja, Michael R. Rice | 2021-08-24 |
| 10910243 | Thermal management system | Tejas Ulavi, Sanjeev Baluja | 2021-02-02 |
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice | 2020-09-29 |
| 9447499 | Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery | Shambhu N. Roy, Vincent E. Burkhart, Natan Solomon, Sanjay Gopinath, Kaihan Ashtiani +3 more | 2016-09-20 |
| 9353439 | Cascade design showerhead for transient uniformity | David Cohen, Davinder Sharma | 2016-05-31 |