Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |