Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11919123 | Apparatus and method for CMP temperature control | Hari Soundararajan, Hui Chen, Shou-Sung Chang | 2024-03-05 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Tejas Ulavi, Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11577358 | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing | Hui Chen, Chih Chung Chou, Shou-Sung Chang | 2023-02-14 |
| 11209398 | High quality factor embedded resonator wafers | Chuang-Chia Lin, Upendra Ummethala | 2021-12-28 |
| 11021790 | Liner for processing chamber | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah | 2021-06-01 |
| 10386126 | Apparatus for controlling temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli +1 more | 2019-08-20 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Satheesh Kuppurao, Mehmet Tugrul Samir, David K. Carlson +9 more | 2017-09-19 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2016-04-26 |
| 9267742 | Apparatus for controlling the temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli +1 more | 2016-02-23 |
| 9248509 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Kallol Bera, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. | 2016-02-02 |
| 8822876 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Hamid Tavassoli, Kallol Bera, Xiaoping Zhou, Shane C. Nevil, Douglas A. Buchberger, Jr. | 2014-09-02 |
| 8629370 | Assembly for delivering RF power and DC voltage to a plasma processing chamber | Hamid Tavassoli, Shane C. Nevil, Douglas A. Buchberger, Jr. | 2014-01-14 |