EPI base ring

Assignee

• Applied Materials

Inventors

• Steve Aboagye (3 patents)
• Paul Brillhart (59 patents)
• Surajit Kumar (14 patents)
• Anzhong Chang (33 patents)
• Satheesh Kuppurao (38 patents)
• Mehmet Tugrul Samir (44 patents)
• David K. Carlson (96 patents)

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